Jméno :doc. Ing. Vladimír Kutiš PhD.
Název :FEM ANALYSIS OF SAW SENSOR
Autoři :KUTIŠ V., GÁLIK G., RÝGER I., MURÍN J., HRABOVSKÝ J., PAULECH J., LALINSKÝ T.
Abstrakt :In this contribution modelling and simulation of surface acoustic waves (SAW) sensor using finite element method will be presented. SAW sensor is made from piezoelectric GaN layer and SiC substrate.
Modal and transient piezoelectric analysis will be performed using FEM code ANSYS.