Jméno :doc. Ing. Luboš Náhlík Ph.D.
Název :APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS
Autoři :PETRÁČKOVÁ K., NÁHLÍK L., TRUHLÁŘ T., KUBĚNA I., HUTAŘ P.
Abstrakt :This paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Experimentally measured data from pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.